23ECE302 · VLSI Design · Mid-Term

The Night-Before Playbook

Every formula, worked example, and practice question from your faculty's own slides for Unit I and the pre-midterm half of Unit II — Pass characteristics through FET RC modelling.

6 topics Faculty's own notation Tap any question to reveal the answer
Quick Reference

60-Second Formula Sheet

Scan this right before you walk in. Every formula links to a full derivation and worked examples below.

Pass characteristics

NMOS: Vout = Min[Vin, VG − VTn] PMOS: Vout = Max[VG + |VTp|, Vin] nFET → strong-0 / weak-1 pFET → strong-1 / weak-0

CMOS schematic algorithm

1. Write f → 2. Find f′ 3. #literals(f′) = #transistors 4. PDN(NMOS): AND→series, OR→parallel 5. PUN(PMOS) = dual of PDN

Interconnect RC

R = ρl/A, Rs = ρ/t [Ω/sq] R_line = Rs·n (corner sq. ×0.635) C = εox·w·l / Tox, τ = RC

nFET current (Ch.6 notation)

Triode: ID=k'n(W/L)[(VGSn−VTn)VDSn−VDSn²/2] Sat: ID=(βn/2)(VGSn−VTn)² VDSn,sat = VGSn − VTn

Threshold w/ body bias

VTn = VT0n + γ(√(2|φF|+VSBn) − √(2|φF|)) γ = √(2q·εSi·Na) / Cox

Scaling (factor S)

Full: VDD,ID,PD ÷S · PD/Area unchanged Const-V: ID,PD ×S · PD/Area ×S³

FET RC model

Rn = 1/[βn(VDD−VTn)] (η=1) CG=Cox·W·L′, CGS≈CGD≈CG/2 Elmore: TD=ΣRi·Ci (ladder)

MOSFETs as Logic Switches & Pass Characteristics

Unit I — core exam topic. Master the Min/Max formula and you can answer every pass-characteristic numerical.

Ideal-Switch Model & MOSFET-as-Switch

Assert-high (nFET): switch closes when control A = 1 (VGS ≥ VTn). No bubble on gate symbol.

Assert-low (pFET): switch closes when control A = 0 (VSG ≥ |VTp|). Bubble on gate symbol.

ConnectionLogicMnemonic
Series switchesANDBoth must be ON for current path
Parallel switchesOREither ON gives current path

Single-supply convention: 0 ≤ Vx ≤ VDD. Logic-0 → Vx = 0 V; Logic-1 → Vx = VDD.

nFET: y = x·A (valid iff A = 1). pFET: y = x·A′ (valid iff A = 0).

Typical thresholds: VTn ≈ 0.5–0.7 V (positive); VTp ≈ −0.5 to −0.8 V (given as |VTp|).

Pass Characteristics — Strong vs Weak Levels

DevicePasses 0Passes 1Output range
nFETStrong 0 (0 V, no loss)Weak 1 (VDD−VTn)[0, VG−VTn]
pFETWeak 0 (|VTp|)Strong 1 (VDD, no loss)[(VG+|VTp|), VDD]

Design rule: Use nFETs to pass logic-0 (VSS = 0 V); use pFETs to pass logic-1 (VDD).

KVL Derivation (faculty method)

NMOS (gate at VG, input Vx):

Vx − VTn − Vout = 0  ⇒  Vout = Vx − VTn

  • Vx = 0 V ⇒ Vout = −VTn ⇒ clamped to 0 V (Strong 0).
  • Vx = VDD ⇒ Vout = VDD−VTnWeak 1 (threshold voltage loss).

PMOS (gate at VG, input Vx):

Vx + |VTp| − Vout = 0  ⇒  Vout = Vx + |VTp|

  • Vx = 0 V ⇒ Vout = |VTp| ⇒ Weak 0.
  • Vx = VDD ⇒ Vout = VDD+|VTp| ⇒ clamped to VDD (Strong 1).

General Pass-Transistor Formula

NMOS: Vout = Min[ Vin, (VG − VTn) ]
PMOS: Vout = Max[ (VG + |VTp|), Vin ]

If the transistor is OFF ⇒ Vout = floating / high-Z (undefined).

VDD G VDD Vout t VDD Vin VDD−VTn Weak 1 nFET passing VDD 0V VDD 0V Vout t 0V Vin = 0V |VTp| Weak 0 pFET passing 0V
Left: nFET with gate at VDD passing VDD — output settles at VDD−VTn (weak 1, threshold-voltage loss). Right: pFET with gate at 0 V passing 0 V — output settles at |VTp| (weak 0).

Example 1 — Single nFET pass transistor

Given: nFET with gate tied to VDD = 5 V, VTn = 0.7 V. Find Vout for Vin = 2 V, 4.5 V, 3.5 V, 0.7 V.

  1. Compute the clamp ceiling: VG−VTn = 5−0.7 = 4.3 V.
  2. Apply Vout = Min[Vin, 4.3]:
    VinMin[Vin, 4.3]VoutNote
    2.0 VMin[2.0, 4.3]2.0 VUnclamped (below ceiling)
    4.5 VMin[4.5, 4.3]4.3 VClamped — weak 1
    3.5 VMin[3.5, 4.3]3.5 VUnclamped
    0.7 VMin[0.7, 4.3]0.7 VUnclamped

Answer: Vout = 2.0 V, 4.3 V, 3.5 V, 0.7 V respectively. Only Vin = 4.5 V exceeds the ceiling and suffers threshold-voltage loss.

Example 2 — Two-nFET series chain

Given: Two nFETs M1, M2 in series, both gates at VDD = 3.3 V. VTn = 0.55 V. Input = VDD. Find the output.

  1. M1 clamp ceiling = VG−VTn = 3.3−0.55 = 2.75 V.
  2. Vin = 3.3 V > 2.75 V, so output of M1 = Min[3.3, 2.75] = 2.75 V.
  3. This 2.75 V enters M2. M2’s clamp ceiling is also 3.3−0.55 = 2.75 V.
  4. Vout = Min[2.75, 2.75] = 2.75 V — no additional drop.

Answer: Vout = 2.75 V. Key insight: only the first nFET in a series chain causes the threshold drop (VDD−VTn). Subsequent nFETs (with gates at VDD) pass the already-degraded value unchanged because Vin ≤ VG−VTn for them.

Example 3 — Cascaded gate-drive (double threshold loss)

Given: nFET M1 with gate at VDD = 3.3 V, input = VDD. Its output drives the gate of nFET M2. M2’s input Vb = VDD. VTn = 0.60 V. Find Vout2.

  1. Stage 1: VG1 = VDD = 3.3 V. Clamp = 3.3−0.60 = 2.7 V. Vout1 = Min[3.3, 2.7] = 2.7 V.
  2. Stage 2: Vout1 is now VG2 = 2.7 V (it drives M2’s gate). New clamp = 2.7−0.60 = 2.1 V.
  3. M2’s input Vb = VDD = 3.3 V. Vout2 = Min[3.3, 2.1] = 2.1 V.

Answer: Vout2 = 2.1 V = VDD−2VTn. When one nFET’s output drives another’s gate, each stage loses one VTn — this is cascaded threshold loss, far worse than a series chain.

Practice Questions

Q1. (Floating-node / mixed stack) A pFET (gate = 0 V, |VTp| = 0.7 V) connects VDD = 3.3 V to node Vx. An nFET (gate = VDD, VTn = 0.7 V) connects Vx to 0 V. Both are ON. What is Vx? Which device’s source/drain assignment must you identify first?

Step 1 — pFET: Gate = 0 V, source at VDD = 3.3 V (higher side for pFET). VSG = 3.3−0 = 3.3 V > |VTp| = 0.7 V ⇒ ON. Passes logic-1: Vx from pFET = VDD = 3.3 V (strong 1, pFET passes 1 cleanly).

Step 2 — nFET: Gate = VDD = 3.3 V. It connects Vx to 0 V. nFET passes 0 V upward — strong 0. So it tries to pull Vx to 0 V.

Conflict: Both ON simultaneously ⇒ Vx is a contested (ratioed) node — its steady-state depends on the relative drive strengths (W/L ratios) of the two transistors. This is a static power dissipation / crowbar current situation, which is not a valid CMOS design. In a well-designed circuit, only one should be ON at a time.

The key faculty step: always identify which terminal is source (higher-voltage side for pFET, lower-voltage side for nFET) before applying the pass rules.

Q2. An nFET has VG = VDD = 1.8 V and VTn = 0.4 V. Find Vout when Vin = 1.5 V.

Clamp ceiling = VG−VTn = 1.8−0.4 = 1.4 V.

Vout = Min[1.5, 1.4] = 1.4 V (clamped — weak 1).

Q3. A pFET has gate = 0 V, |VTp| = 0.6 V, VDD = 2.5 V. Input Vin = 0.3 V is applied. Find Vout.

Vout = Max[(VG+|VTp|), Vin] = Max[(0+0.6), 0.3] = Max[0.6, 0.3] = 0.6 V (clamped at |VTp| — weak 0, cannot pass a clean 0).

Q4. Three nFETs in series, all gates at VDD = 5 V, VTn = 0.7 V. Input = VDD. What is Vout?

M1 ceiling = 5−0.7 = 4.3 V. Vout1 = Min[5, 4.3] = 4.3 V.

M2 ceiling = 5−0.7 = 4.3 V. Vout2 = Min[4.3, 4.3] = 4.3 V (no further drop).

M3 ceiling = 5−0.7 = 4.3 V. Vout3 = Min[4.3, 4.3] = 4.3 V.

Answer: 4.3 V. Same result as Example 2 — in a series chain (all gates at VDD), only the first transistor clips the voltage. Subsequent ones pass it through unchanged.

Q5. An nFET (VG = 2.5 V, VTn = 0.5 V) passes a signal. For Vin = 0 V, 1.8 V, and 3.3 V, find Vout for each.

Ceiling = VG−VTn = 2.5−0.5 = 2.0 V.

  • Vin = 0 V: Min[0, 2.0] = 0 V (strong 0, passes cleanly).
  • Vin = 1.8 V: Min[1.8, 2.0] = 1.8 V (unclamped, below ceiling).
  • Vin = 3.3 V: Min[3.3, 2.0] = 2.0 V (clamped — weak 1).
Q6. (Conceptual) Why can’t an nFET pass a clean logic-1? Why is a pFET used instead?

When an nFET tries to pass VDD, its source rises toward VDD. Since the gate is at VDD, VGS = VG−VS keeps shrinking. Once VS reaches VDD−VTn, we have VGS = VTn and the transistor is at the edge of cutoff — it can no longer sustain drain current. The output is therefore stuck at VDD−VTn (a “weak 1”).

A pFET with gate at 0 V passing VDD has VSG = VDD−0 = VDD, which stays well above |VTp| — it remains fully ON and drives the output all the way to VDD (strong 1, no threshold loss).

CMOS Logic Design & Transmission Gates

Unit I — Structured PUN/PDN design method, basic and complex CMOS gates, and transmission-gate circuits.

How to Draw a CMOS Schematic — Faculty Algorithm

  1. Write the output function f.
  2. Find the complement f'.
  3. Number of literals in f' = number of transistors needed.
  4. #NMOS = #PMOS (always equal — pull-down mirrors pull-up).
  5. Draw the NMOS pull-down network (PDN) directly from f': AND → series, OR → parallel.
  6. Draw the PMOS pull-up network (PUN) as the logical dual of the NMOS network — same topology with series↔parallel swapped; inputs are not complemented (PUN and PDN are dual networks, not complemented ones).

PUN/PDN duality rule: PUN (PMOS only, wired to VDD) + PDN (NMOS only, wired to GND) form logically dual networks.

Bubble-pushing mapping (memorize this):

Boolean op in f'NMOS (PDN)PMOS (PUN)
ANDSeries nFETsParallel pFETs
ORParallel nFETsSeries pFETs
VDD PMOS Y NMOS GND A PUN PDN
CMOS inverter: PUN (PMOS) pulls Y to VDD when A = 0; PDN (NMOS) pulls Y to GND when A = 1 — the two networks are always logical duals of each other (Step 5–6 of the schematic-drawing algorithm).

Gate Derivations: NAND2, NOR2, AOI Complex Logic

NAND2

f = (AB)'  →  f' = AB

f' = AB → 2 literals → 2 NMOS + 2 PMOS = 4 transistors.

PDN (from f' = A·B): AND → nFET A in series with nFET B, between output and GND.
PUN (dual): series → parallel → pFET A in parallel with pFET B, between VDD and output.

When both A=1 and B=1 → PDN pulls output to 0. Otherwise at least one pFET is ON → output = 1.

NOR2

f = (A+B)'  →  f' = A+B

f' = A+B → 2 literals → 2 NMOS + 2 PMOS = 4 transistors.

PDN (from f' = A+B): OR → nFET A in parallel with nFET B, between output and GND.
PUN (dual): parallel → series → pFET A in series with pFET B, between VDD and output.

When either A=1 or B=1 → PDN pulls output to 0. Only when both A=0, B=0 → PUN active → output = 1.

Note: AND2 = NAND2 + inverter = 6T. OR2 = NOR2 + inverter = 6T.

Complex Logic Example — AOI: f = (A·B + C·D)'

Example 1 — AOI22 Gate Derivation

Given: f = (A·B + C·D)' (AND-OR-Invert with two 2-input AND terms).

  1. Write f: f = (AB + CD)'.
  2. Find f': f' = AB + CD.
  3. Transistor count: 4 literals in f' → 4 NMOS + 4 PMOS = 8 transistors.
  4. PDN from f' = AB + CD: The outer OR means two parallel branches. The inner ANDs mean series pairs within each branch.
    Branch 1: nFET A in series with nFET B.
    Branch 2: nFET C in series with nFET D.
    Both branches connect between the output node and GND in parallel.
  5. PUN (dual of PDN): Swap series↔parallel.
    The outer parallel (OR) becomes series: two series groups connected end-to-end between VDD and output.
    The inner series (AND) becomes parallel: within each group, pFETs are in parallel.
    Group 1: pFET A ∥ pFET B (parallel).
    Group 2: pFET C ∥ pFET D (parallel).
    Group 1 in series with Group 2, from VDD to output.

Answer: 8-transistor CMOS gate. PDN: (A ser B) par (C ser D) → GND. PUN: (A par B) ser (C par D) → VDD. Output = (AB + CD)'.

Technique: Reverse-Engineering nFET Array from Given pFET Array

A common exam pattern: you are given only the pFET pull-up network diagram and asked to draw the complementary nFET pull-down network and state the function. The method is direct — apply the duality rule: every series connection in the given PUN becomes parallel in the PDN, and every parallel connection becomes series. The inputs (gate labels) stay the same; only the topology flips. Once the PDN is drawn, read the Boolean expression from the PDN (AND for series, OR for parallel) — this gives f'. Then f = (f')'. Verify by checking that PUN conducts for all input combos where f = 1 and PDN conducts for all combos where f = 0.

Transmission Gates (TG)

Definition: A transmission gate is an nFET in parallel with a pFET, with their gates driven by complementary control signals s (nFET gate) and s' (pFET gate). It is bidirectional.

Key property — full rail-to-rail swing with NO threshold-voltage loss:

  • A lone nFET pass transistor passes a strong 0 but only a weak 1 (output tops out at VDD − VTn).
  • A lone pFET pass transistor passes a strong 1 but only a weak 0 (output bottoms out at |VTp|).
  • In a TG, the nFET handles the low-voltage region well (strong 0) while the pFET handles the high-voltage region well (strong 1). Together they cover the full range [0, VDD] — each device compensates where the other is weak. No threshold drop on either rail.

2:1 MUX equation:

F = P0·s' + P1·s

TG0 is gated by s' (passes P0 when s=0); TG1 is gated by s (passes P1 when s=1). Exactly one TG is ON at a time → F receives the selected input at full rail levels.

Extension: A 4:1 MUX uses select lines (s1, s0) and 4 TGs, each gated by a unique minterm of the select lines.

TG0 TG1 P0 P1 F s' s s s'
2:1 MUX from two transmission gates. TG0 passes P0 when s=0 (s'=1); TG1 passes P1 when s=1. Outputs share a common node F. Exactly one TG conducts at a time, giving F = P0·s' + P1·s with full rail-to-rail swing.

Practice Questions

Q1. Compare NAND2 and NOR2: derive the PDN and PUN for each and state transistor counts.

NAND2: f = (AB)', f' = AB. Literals in f' = 2 → 2N + 2P = 4T.
PDN: A series B (AND → series nFETs) to GND.
PUN (dual): A parallel B (series → parallel pFETs) to VDD.

NOR2: f = (A+B)', f' = A+B. Literals in f' = 2 → 2N + 2P = 4T.
PDN: A parallel B (OR → parallel nFETs) to GND.
PUN (dual): A series B (parallel → series pFETs) to VDD.

Both use 4 transistors. Difference is topology: NAND has series PDN/parallel PUN; NOR has parallel PDN/series PUN. Series PMOS in NOR is slower to pull up (pFET mobility is lower), so NAND is generally preferred.

Q2. You are given a pFET pull-up network: pFET A in series with (pFET B ∥ pFET C). Draw the nFET pull-down network and state the logic function.

Step 1 — Dual the PUN to get the PDN:
PUN: A series (B ∥ C) → PDN: A parallel (B series C).
So PDN = nFET A in parallel with (nFET B in series with nFET C), all between output and GND.

Step 2 — Read f' from PDN:
PDN expression: f' = A + BC (parallel = OR, series = AND).

Step 3 — Find f:
f = (A + BC)' = A'·(BC)' = A'·(B' + C') (DeMorgan).

Verification from PUN: PUN conducts when A=0 AND (B=0 OR C=0), i.e., A'·(B'+C') ✓.

Q3. Design f = (A+B+C)' + A'B using transmission gates with minimum transistors. (Full worked solution.)

Step 1 — Simplify:
f = (A+B+C)' + A'B = A'B'C' + A'B = A'(B'C' + B) = A'(B + B'C') = A'(B + C')  [absorption: B + B'C' = B + C'].

Step 2 — Express as MUX-style TG decomposition on variable A:
When A=0: f = B + C'.
When A=1: f = 0.

So: f = (B + C')·A' + 0·A = (B + C')·A'.

Step 3 — Build:

  • TG0 controlled by A'/A: passes input (B + C') when A=0.
  • TG1 controlled by A/A': passes 0 (GND) when A=1.
  • Need (B + C') = NOR(B',C) inverted… simplest: build (B+C') with a NOR gate on B' and C, but since we need complement inputs anyway, use a CMOS NOR/OR or another TG level.

Most efficient: generate (B + C') via TG decomposition on B:
When B=1: (B+C') = 1 → output = VDD.
When B=0: (B+C') = C'.

So (B+C') = 1·B + C'·B' → TG pair: one passes VDD when B=1, one passes C' when B=0.

Final circuit:
• 1 inverter for A → A' (2T).
• 1 inverter for C → C' (2T).
• TG pair for (B+C'): TG passes VDD when B=1, TG passes C' when B=0 (4T).
• TG pair for final MUX on A: TG passes (B+C') when A=0, TG passes GND when A=1 (4T — but TG passing constant GND can be a single nFET tied to GND, saving 1T, so 3T or keep 4T for clean design).
Total: 12T (vs. 16T for a direct CMOS implementation of the unsimplified expression).

Q4. Design a CMOS gate for f = (AB + C)'. State transistor count, draw PDN and PUN.

Step 1: f = (AB + C)', so f' = AB + C.

Step 2: Literals in f' = 3 (A, B, C) → 3 NMOS + 3 PMOS = 6 transistors.

Step 3 — PDN (from f' = AB + C):
OR of two terms → two parallel branches to GND.
Branch 1: A series B (AND).
Branch 2: C alone.
So: (nFET A ser nFET B) ∥ (nFET C), all between output and GND.

Step 4 — PUN (dual):
Parallel → series, series → parallel.
The outer parallel becomes series: two groups in series from VDD to output.
Group 1 (dual of A ser B): pFET A ∥ pFET B.
Group 2 (dual of C alone): pFET C.
So: (pFET A ∥ pFET B) in series with pFET C, from VDD to output.

Answer: 6T AOI gate. Output = (AB + C)'.

Q5. Design f = (A + BC)' in CMOS. State the transistor count and derive PUN/PDN.

Step 1: f = (A + BC)', so f' = A + BC.

Step 2: Literals in f' = 3 → 3 NMOS + 3 PMOS = 6 transistors.

Step 3 — PDN (from f' = A + BC):
OR → parallel branches.
Branch 1: nFET A alone.
Branch 2: nFET B in series with nFET C (AND).
Result: nFET A ∥ (nFET B ser nFET C) between output and GND.

Step 4 — PUN (dual):
Outer parallel → series. Inner series → parallel.
Group 1: pFET A alone.
Group 2: pFET B ∥ pFET C.
Result: pFET A in series with (pFET B ∥ pFET C), from VDD to output.

Answer: 6T OAI gate. Output = (A + BC)'.

Q6. Implement f = A ⊕ B (XOR) using transmission gates. How many transistors?

TG decomposition on variable A:
When A=0: f = 0⊕B = B.
When A=1: f = 1⊕B = B'.

So: f = B·A' + B'·A (this is the canonical XOR form, and it maps directly to a 2:1 TG MUX).

Circuit:
• TG0 controlled by A'/A: passes B when A=0.
• TG1 controlled by A/A': passes B' when A=1.
• Need A' (1 inverter = 2T) and B' (1 inverter = 2T).
• 2 TGs = 4T.

Total: 8 transistors (2 TGs + 2 inverters). This matches the faculty's 8T XOR count from the notes.

CMOS Layers, Interconnect RC & Stick Diagrams

Unit I — Interconnect parasitics, CMOS process layers, metal stack, and the Euler-path method for compact stick-diagram layout.

Interconnect R/C Parasitics

Line resistance from bulk resistivity:

Rline = ρ · l / A

Sheet resistance (resistance of one square of material, any size):

Rs = ρ / t = 1 / (σ · t) [Ω/□]

Counting squares:

Rline = Rs · n, where n = l / w = number of squares

Corner-square rule: each 90° corner square contributes only 0.635 of a normal square's resistance (this constant appears in both the slide numerical and the handwritten booklet — near-certain exam content).

neff = nstraight + 0.635 · ncorners

Line capacitance (parallel-plate model):

Cline = εox · w · l / Tox

where εox = 3.9 · ε0, ε0 = 8.854 × 10−12 F/m.

Propagation delay:

τ = Rline · Cline
v(t) = Vs · (1 − e−t/τ)

Typical faculty-problem ranges: Rs = 25–35 Ω/□, Tox = 600–12 000 Å.

Example 1 — Serpentine-trace R, C, τ

Given: A metal interconnect of width w = 2 µm follows a bent path: 6 squares to the right, a 90° corner downward, 4 squares downward, and a 90° corner to the left — giving 10 straight squares and 2 corner squares (12 geometric squares total). Rs = 30 Ω/□, Tox = 1000 Å. Find Rline, Cline, and τ.

  1. Effective number of squares:
    neff = 10 + 0.635 × 2 = 10 + 1.27 = 11.27 squares
  2. Line resistance:
    Rline = Rs · neff = 30 × 11.27 = 338.1 Ω
  3. Total trace length (all 12 geometric squares contribute area for C):
    l = 12 × w = 12 × 2 µm = 24 µm
  4. Line capacitance (Tox = 1000 Å = 10−7 m):
    Cline = (3.9 × 8.854 × 10−12) × (2 × 10−6) × (24 × 10−6) / 10−7
    = 34.531 × 10−12 × 48 × 10−12 / 10−7
    = 1657.5 × 10−24 / 10−7 = 16.57 × 10−15 F
    Cline ≈ 16.57 fF
  5. RC delay:
    τ = 338.1 × 16.57 × 10−15 = 5604 × 10−15 s ≈ 5.60 ps

Answer: Rline = 338.1 Ω, Cline ≈ 16.57 fF, τ ≈ 5.60 ps.

CMOS Layer Definitions

nFET: n+ source/drain regions in a p-type substrate. pFET: p+ source/drain regions in an n-well (Figs 3.16 a/b). L = channel length, W = channel width, W/L = aspect ratio.

n-well process flow: start with p-type substrate → nFETs are built directly in the substrate → an n-well is added to host the pFETs.

Visible Features vs Mask Layers

Visible Features (physical)Mask Layers (fabrication)
p-substraten-well mask
n-wellActive mask (= NOT field-oxide/FOX)
n+ source/drainn+ doping mask
p+ source/drainp+ doping mask
Gate oxidePoly patterning mask
Poly gate

⚠ Key conceptual nuances (quiz-worthy):

  • "Active = NOT FOX" — the active area is wherever field oxide is absent.
  • Gate oxide is self-aligned to the poly gate — there is no separate oxide mask for it. The poly itself defines where the gate oxide matters.
p-substrate n-well n+ (S) n+ (D) poly (G) nFET p+ (S) p+ (D) poly (G) pFET poly gate n-type (well / n+) p-type (sub / p+) metal 1
nFET (in p-substrate) vs pFET (in n-well): opposite doping for source/drain, both gated by a poly strip over thin gate oxide, contacted by Metal 1. This is the physical structure the layout/stick-diagram legend abstracts into flat colored strips.

Metal Stack Build Sequence & Layout Legend

Metal stack, bottom to top (memorize this order):

  1. Active (n+/p+ diffusion regions)
  2. Poly gate
  3. Ox1 — first oxide layer; contact holes opened to poly & active
  4. Contacts (wherever metal meets diffusion or poly — different physical levels must be tied)
  5. Metal1
  6. Ox2 — inter-level dielectric
  7. Via (connects Metal1 to Metal2)
  8. Metal2
  9. (Repeat Ox → Via → Metal for additional levels)

VDD and GND are both routed in metal.

Standard-Cell Inverter Layout Legend (Figs 3.31/3.32)

The same four color tokens are used consistently across all layout and stick diagrams in this guide — tie each to the cross-section figure above:

LayerColor TokenVisual Convention
Polysilicon (gate)var(--poly)Diagonal hatch / red
n+/p+ Diffusion (active)var(--diff)Solid outline box / tan-mustard
Metal1var(--metal)Solid blue box
n-well boundaryvar(--nwell)Dashed line (distinguishes pFET region)

Contacts are drawn as small squares with an "×" mark. n+ and p+ diffusion share the same fill — only the dashed n-well boundary tells them apart in the layout.

Euler's-Graph Method for Stick-Diagram Layout

Goal: find a single poly-gate ordering that allows both the PMOS and NMOS diffusion strips to be drawn as unbroken runs — no breaks, no jumps.

  1. Build two graphs from the transistor-level schematic:
    • PMOS graph — nodes are the PMOS supply/output terminals (VDD, internal nodes, Out); edges are pFET transistors, labeled by the controlling gate input.
    • NMOS graph — nodes are the NMOS terminals (Out, internal nodes, GND); edges are nFET transistors, labeled by the controlling gate input.
  2. Find a common Euler path — an ordering of edge-labels (inputs) that traverses every edge of both graphs exactly once without repeating an edge. This ordering becomes the sequence in which poly-gate strips cross the diffusion.
  3. Draw the stick diagram: lay a single PMOS diffusion strip and a single NMOS diffusion strip; cross them with vertical poly gates in the Euler-path order.

Series vs Parallel in layout:

  • Series MOSFETs → single diffusion strip crossed by multiple poly gates in sequence (internal diffusion nodes shared).
  • Parallel MOSFETs → diffusion shared at both ends. Faculty also shows an equivalent compact "+" / cross-shaped shared-diffusion symbol for a parallel pair — both notations are equivalent.

Worked example: AOI21 gate — f = (AB + C)′

NMOS pull-down (conducts when AB + C = 1): A in series with B (for AB), C in parallel with the AB chain.

  • Nodes: Out, N1, GND
  • Edges: A (Out—N1), B (N1—GND), C (Out—GND)

PMOS pull-up (conducts when AB + C = 0, i.e. (A′+B′)·C′): C in series with (A parallel B).

  • Nodes: VDD, N2, Out
  • Edges: C (VDD—N2), A (N2—Out), B (N2—Out)

Common Euler path:

  • PMOS: VDDC N2 →A Out →B N2 — edge order: C, A, B
  • NMOS: GND →C Out →A N1 →B GND — edge order: C, A, B

∴ Poly-gate ordering left to right: C, A, B.

PMOS Graph VDD N2 Out C A B NMOS Graph Out N1 GND A B C Common Euler path → poly order: C, A, B
PMOS and NMOS Euler graphs for the AOI21 gate f = (AB + C)′. Node circles represent supply/output/internal terminals; edges represent transistors labeled by gate input. The common Euler path C → A → B gives the poly-gate crossing order for a single-strip stick diagram.

Practice Questions

Q1. A metal trace (w = 3 µm, Rs = 25 Ω/□) follows an L-shaped path: 8 straight squares and 3 corner squares. Oxide thickness Tox = 800 Å. Find Rline, Cline, and τ.
  1. Effective squares: neff = 8 + 0.635 × 3 = 8 + 1.905 = 9.905
  2. Rline = 25 × 9.905 = 247.6 Ω
  3. Total geometric squares = 8 + 3 = 11 → l = 11 × 3 µm = 33 µm
  4. Cline = (3.9 × 8.854 × 10−12) × (3 × 10−6) × (33 × 10−6) / (800 × 10−10)
    = 34.531 × 10−12 × 99 × 10−12 / 8 × 10−8
    = 3418.6 × 10−24 / 8 × 10−8 = 42.73 fF
  5. τ = 247.6 × 42.73 × 10−15 = 10.58 ps
Q2. Match each item to either "Visible Feature" or "Mask Layer": (a) n-well, (b) Active mask, (c) p+ source/drain, (d) Poly patterning mask, (e) Gate oxide, (f) n+ doping mask.
  • (a) n-well — Visible Feature (physical structure in the substrate)
  • (b) Active mask — Mask Layer (defines where field oxide is absent; "active = NOT FOX")
  • (c) p+ source/drain — Visible Feature (physical doped region)
  • (d) Poly patterning mask — Mask Layer (defines polysilicon gate geometry)
  • (e) Gate oxide — Visible Feature (physical; self-aligned to poly — no separate oxide mask exists)
  • (f) n+ doping mask — Mask Layer (defines where n-type implant is applied)
Q3. For the OAI12 gate f = (A(B + C))′, construct the PMOS and NMOS Euler graphs and find a common Euler path (poly-gate ordering).

NMOS pull-down (conducts when A(B+C) = 1): A in series with (B ∥ C).

  • Nodes: Out, N1, GND
  • Edges: A (Out—N1), B (N1—GND), C (N1—GND)

PMOS pull-up (conducts when complement = A′ + B′C′): A in parallel with (B series C).

  • Nodes: VDD, N2, Out
  • Edges: A (VDD—Out), B (VDD—N2), C (N2—Out)

NMOS path: Out →A N1 →B GND →C N1 → edge order: A, B, C

PMOS path: Out →A VDDB N2 →C Out → edge order: A, B, C

Common Euler path ∴ poly order: A, B, C.

Q4. Why is there no "gate oxide mask" in the n-well CMOS mask set? What does "self-aligned" mean in this context?

The gate oxide is grown everywhere over the active area, and the polysilicon gate is patterned on top of it. The poly gate itself defines where the channel forms beneath — the oxide under the poly becomes the gate oxide, while oxide elsewhere is irrelevant (or etched away for contacts). Because the gate region is defined by the poly mask, not by a separate oxide mask, we say the gate oxide is self-aligned to the poly gate. This eliminates an entire mask step and avoids alignment errors between the gate and the channel.

Q5. A student draws the cross-section with Metal1 below the polysilicon layer and contacts above Metal2. Identify the errors and give the correct bottom-to-top ordering.

Errors:

  • Metal1 is above poly, not below it. Poly is deposited on the gate oxide; Metal1 comes after the first inter-level oxide (Ox1).
  • Contacts connect poly/active to Metal1 — they sit between active/poly and Metal1, not above Metal2.

Correct order (bottom → top): Active → Poly gate → Ox1 (with contact holes) → Contacts → Metal1 → Ox2 → Via → Metal2.

Q6. Two traces have identical Rs = 30 Ω/□ and the same total geometric area (20 squares). Trace A is a straight line (20 straight squares, 0 corners). Trace B is a serpentine with 14 straight squares and 6 corners. Which has lower resistance, and by how much?
  • Trace A: neff = 20; RA = 30 × 20 = 600 Ω
  • Trace B: neff = 14 + 0.635 × 6 = 14 + 3.81 = 17.81; RB = 30 × 17.81 = 534.3 Ω

Trace B has lower resistance by 600 − 534.3 = 65.7 Ω (≈ 11% less), despite the same geometric footprint area. Corners spread current across a wider cross-section, reducing effective resistance per square. Note: both traces have the same capacitance (same geometric area), so Trace B also has a lower τ.

MOSFET Physics, Current Derivation & I-V Characteristics

Unit II — Core drain-current derivation, region boundaries, and nFET/pFET formulas.

MOS Physics & Threshold Voltage

Oxide capacitance — the gate dielectric's capacitance per unit area:

Cox = εox / tox (F/cm2), εox = 3.9 · ε0, ε0 = 8.854 × 10−14 F/cm

Surface charge (field effect) — the gate voltage induces charge at the Si surface:

Qs = −Cox · VG (C/cm2)

KVL across the MOS stack: VG = Vox + φs.

Bulk (depletion) charge — immobile ionised acceptors under the gate:

QB = −√(2 · q · εSi · Na · φs), εSi ≈ 11.8 · ε0

Below vs. above threshold:

  • VG < VTn: QS = QB only (immobile depletion charge, no current).
  • VG > VTn: QS = QB + Qe, where Qe < 0 represents mobile electrons.
Qe = −Cox · (VG − VTn)

VTn is the minimum gate voltage to form a mobile inversion channel — the boundary between "bulk-charge-only" and "free-electron-present" regimes.

Body-bias effect — VTn shifts when source-to-bulk voltage is non-zero:

VTn = VT0n + γ · ( √(2|φF| + VSBn) − √(2|φF|) )
γ = √(2 · q · εSi · Na) / Cox (V0.5)
F| = (kT/q) · ln(Na / ni), ni = 1.45 × 1010 cm−3

nFET Drain-Current Derivation

Drawn vs. electrical dimensions: L = L′ − dL, W = W′ − dW.

  1. Channel charge as a function of position y:
    Qe(y) = −Cox · [VGSn − VTn − V(y)]

    At source (y = 0): Qe = −Cox(VGSn − VTn). At drain (y = L): Qe = −Cox(VGSn − VTn − VDSn).

  2. Differential-element method:
    dV = IDn · dR, dR = dy / (σn · An) = dy / (q · μn · ne · W · xe)

    Channel charge density: Qe = −q · ne · xe.

  3. Substitute Qe:
    dV = −IDn · dy / (μn · W · Qe) = IDn · dy / [μn · W · Cox · (VGSn − VTn − V(y))]
  4. Integrate y: 0 → L, V: 0 → VDSn. Define process and device transconductance:
    k′n = μn · Cox (process transconductance parameter)
    βn = k′n · (W/L) (device transconductance, A/V2)
  5. Triode / Linear region result:
    IDn = μn · Cox · (W/L) · [(VGSn − VTn) · VDSn − VDSn2/2]
    = k′n · (W/L) · [(VGSn − VTn) · VDSn − VDSn2/2]
    = (βn/2) · [2 · (VGSn − VTn) · VDSn − VDSn2]
  6. Find saturation boundary: Set dIDn/dVDSn = 0:
    VDS,sat = VGSn − VTn
  7. Saturation region result (substitute VDS,sat for VDSn):
    IDn = (βn/2) · (VGSn − VTn)2

    With channel-length modulation (λ in V−1):

    IDn = (βn/2) · (VGSn − VTn)2 · [1 + λ · (VDSn − VDS,sat)]

I-V Region Summary

RegionConditionIDn
CutoffVGSn < VTn0
TriodeVGSn ≥ VTn, VDSn < VGSn − VTnk′n(W/L)[(VGSn − VTn)VDSn − VDSn2/2]
SaturationVGSn ≥ VTn, VDSn ≥ VGSn − VTn(1/2)k′n(W/L)(VGSn − VTn)2
V_DS I_D triode / saturation boundary VGSn=Vt+1 VGSn=Vt+2 VGSn=Vt+3 VGSn=Vt+4 triode saturation V_GS I_D V_Tn cutoff (I_D = 0) quadratic rise
Top: I_D–V_DS family of curves for increasing V_GSn — each curve rises through triode, then flattens at the dashed V_DS = V_GSn − V_Tn boundary into saturation. Bottom: the I_D–V_GS transfer curve — zero below V_Tn, quadratic above it.

pFET Equations (Mirror of nFET)

All voltages referenced as VSGp, VSDp (source-referenced, positive for a conducting pFET). |VTp| is the magnitude of the pFET threshold.

Saturation:

IDp = (βp/2) · (VSGp − |VTp|)2

Triode:

IDp = (βp/2) · [2 · (VSGp − |VTp|) · VSDp − VSDp2]

Saturation voltage:

VDS,sat(p) = VSGp − |VTp|

Linear resistance (η = 1):

Rp = 1 / [βp · (VDD − |VTp|)]

Mobility ratio: r = μnp ≈ 2–3. To equalise drive strength, size the pFET wider: Wp ≈ r · Wn.

Example 1 — Oxide Capacitance & k′ Calculation

Given: tox = 100 Å, μn = 550 cm2/V·s, μp = 210 cm2/V·s.

  1. Cox = εox / tox = (3.9 × 8.854 × 10−14) / (100 × 10−8) = 3.453 × 10−7 / 10−6 = 3.45 × 10−7 F/cm2 = 3.45 fF/μm2.
  2. k′n = μn · Cox = 550 × 3.45 × 10−7 = 189.92 × 10−6 A/V2 = 189.92 μA/V2.
  3. k′p = μp · Cox = 210 × 3.45 × 10−7 = 72.45 × 10−6 ≈ 75.51 μA/V2.

Answer: Cox = 3.45 fF/μm2; k′n = 189.92 μA/V2; k′p = 75.51 μA/V2.

Example 2 — nFET Triode vs. Saturation

Given: nFET W = 10 μm, L = 0.35 μm, k′n = 110 μA/V2, VTn = 0.7 V, VSBn = 0.

  1. βn = k′n · (W/L) = 110 × (10/0.35) = 3142.86 μA/V2 = 3.143 mA/V2.
  2. (a) VGSn = 2 V, VDSn = 1 V:
    VDS,sat = VGSn − VTn = 2 − 0.7 = 1.3 V.
    VDSn = 1 V < VDS,sat = 1.3 V → Triode region.
    IDn = (βn/2) · [2(VGSn − VTn)VDSn − VDSn2]
    = (3.143/2) · [2 × 1.3 × 1 − 12] = 1.5715 × [2.6 − 1] = 1.5715 × 1.6 = 2.51 mA.
  3. (b) VGSn = 2 V, VDSn = 2 V:
    VDS,sat = 1.3 V < VDSn = 2 V → Saturation region.
    IDn = (βn/2) · (VGSn − VTn)2 = 1.5715 × (1.3)2 = 1.5715 × 1.69 = 2.66 mA.

Answer: (a) Triode, IDn = 2.51 mA. (b) Saturation, IDn = 2.66 mA.

Example 3 — pFET Saturation Current & Resistance

Given: pFET W = 20 μm, L = 0.5 μm, k′p = 120 μA/V2, VTp = −0.6 V, VG = 3 V, VS = 5 V, VD = 3.5 V.

  1. VSGp = VS − VG = 5 − 3 = 2 V.
  2. VSDp = VS − VD = 5 − 3.5 = 1.5 V.
  3. VSD,sat = VSGp − |VTp| = 2 − 0.6 = 1.4 V.
  4. VSD,sat = 1.4 V < VSDp = 1.5 V → Saturation region.
  5. βp = k′p · (W/L) = 120 × 10−6 × (20/0.5) = 4.8 × 10−3 A/V2.
  6. IDp = (βp/2) · (VSGp − |VTp|)2 = (4.8 × 10−3/2) × (1.4)2 = 2.4 × 10−3 × 1.96 = 4.7 mA.
  7. Rp = VSDp / IDp = 1.5 / 4.7 × 10−3 = 318.88 Ω.

Answer: Saturation; IDp = 4.7 mA, Rp = 318.88 Ω.

Practice Questions

Q1. Body-bias threshold shift (Numerical 3 from notes)

Given: tox = 120 Å, Na = 8 × 1014 cm−3, VT0n = 0.55 V, W/L = 10, μn = 540 cm2/V·s.

  1. Cox: Cox = 3.9 × 8.854 × 10−14 / (120 × 10−8) = 3.453 × 10−7 / 1.2 × 10−5 = 2.878 × 10−7 F/cm2.
  2. γ: γ = √(2 × 1.6 × 10−19 × 11.8 × 8.854 × 10−14 × 8 × 1014) / Cox = 0.0568 V0.5.
  3. 2|φF|:F| = (kT/q) · ln(Na/ni) = 0.026 × ln(8 × 1014 / 1.45 × 1010) = 0.026 × ln(5.517 × 104) = 0.026 × 10.92 = 0.284 V. So 2|φF| = 0.568 V.
  4. (a) VSBn = 2 V: VTn = 0.55 + 0.0568 × (√(0.568 + 2) − √0.568) = 0.55 + 0.0568 × (√2.568 − √0.568) = 0.55 + 0.0568 × (1.603 − 0.754) = 0.55 + 0.0568 × 0.849 = 0.55 + 0.048 = 0.598 V.
  5. (b) VSBn = 3 V: VTn = 0.55 + 0.0568 × (√3.568 − √0.568) = 0.55 + 0.0568 × (1.889 − 0.754) = 0.55 + 0.0568 × 1.135 = 0.55 + 0.064 = 0.614 V.
  6. At VGSn = 3 V, VDSn = 3 V, VTn = 0.614 V: VDS,sat = 3 − 0.614 = 2.386 V < VDSn = 3 V → Saturation. IDn = (μn · Cox / 2) · (W/L) · (VGSn − VTn)2 = (540 × 2.878 × 10−7 / 2) × 10 × (2.386)2442.31 μA.
Q2. Cutoff verification — k′n = 100 μA/V2, W/L = 5, VTn = 0.8 V, VGSn = 0.5 V, VDSn = 2 V. Find IDn.

Check: VGSn = 0.5 V < VTn = 0.8 V → Cutoff region.

IDn = 0. The channel has not formed; no conduction regardless of VDSn.

Q3. Triode drill — k′n = 150 μA/V2, W/L = 8, VTn = 0.6 V, VGSn = 2.5 V, VDSn = 0.5 V. Find the region and IDn.
  1. VDS,sat = VGSn − VTn = 2.5 − 0.6 = 1.9 V.
  2. VDSn = 0.5 V < VDS,sat = 1.9 V → Triode region.
  3. IDn = k′n(W/L)[(VGSn − VTn)VDSn − VDSn2/2] = 150 × 10−6 × 8 × [(1.9)(0.5) − (0.5)2/2] = 1200 × 10−6 × [0.95 − 0.125] = 1200 × 10−6 × 0.825 = 990 μA = 0.99 mA.
Q4. Saturation drill — k′n = 200 μA/V2, W/L = 12, VTn = 0.5 V, VGSn = 1.8 V, VDSn = 3 V. Find the region and IDn.
  1. VDS,sat = VGSn − VTn = 1.8 − 0.5 = 1.3 V.
  2. VDSn = 3 V > VDS,sat = 1.3 V → Saturation region.
  3. IDn = (1/2) · k′n · (W/L) · (VGSn − VTn)2 = (200 × 10−6 / 2) × 12 × (1.3)2 = 100 × 10−6 × 12 × 1.69 = 2028 μA = 2.028 mA.
Q5. pFET triode drill — k′p = 80 μA/V2, W/L = 15, |VTp| = 0.7 V, VSGp = 2.2 V, VSDp = 0.8 V. Find the region and IDp.
  1. VSD,sat = VSGp − |VTp| = 2.2 − 0.7 = 1.5 V.
  2. VSDp = 0.8 V < VSD,sat = 1.5 V → Triode region.
  3. IDp = (βp/2) · [2(VSGp − |VTp|)VSDp − VSDp2] = (80 × 10−6 × 15 / 2) × [2 × 1.5 × 0.8 − (0.8)2] = 600 × 10−6 × [2.4 − 0.64] = 600 × 10−6 × 1.76 = 1056 μA = 1.056 mA.
Q6. Conceptual — Why is IDn independent of VDSn in the ideal (λ = 0) saturation model?

Once VDSn ≥ VDS,sat = VGSn − VTn, the channel is pinched off at the drain end — the inversion charge Qe(y = L) drops to zero. Any further increase in VDSn simply widens the depletion region beyond the pinch-off point; the voltage across the inverted portion of the channel stays fixed at VDS,sat. Since the current through the channel depends only on the charge profile from source to pinch-off, and that profile is set entirely by VGSn − VTn, the current IDn = (βn/2)(VGSn − VTn)2 has no VDSn term — it is constant. The λ correction adds back a weak VDSn dependence via the effective channel-length shortening (ΔL increases with VDSn).

Scaling Theory in VLSI

Unit II. Each technology generation shrinks device dimensions by a factor S (typically 1.2–1.5), packing more transistors per chip (Moore's-law trajectory). The question is: how do you scale voltages, doping, and fields alongside geometry? Two philosophies exist:

  • Full / constant-field scaling — scale voltages down by S along with dimensions, keeping the internal electric field E = V/d unchanged. Doping increases by S to maintain depletion-width ratios. This is the sustainable approach.
  • Constant-voltage scaling — shrink dimensions by S but leave VDD and VT0 unchanged. Electric fields increase by S, doping must increase by S2. Leads to a power-density blowup that makes it impractical beyond a few generations.

Scaling Table

ParameterBeforeFull (constant-field) scalingConstant-voltage scaling
L, W, tox, Xj÷ S÷ S
VDD, VT0÷ Sunchanged
NA, ND (doping)× S× S2
Cox× S× S
ID÷ S× S
PD (power / device)÷ S2× S
PD / Area (power density)unchanged× S3
Before p-substrate n+ n+ Gate W L tox After (scale S) p-sub n+ n+ Gate W/S L/S tox/S
MOSFET cross-section before and after scaling by factor S. All physical dimensions (L, W, tox) shrink by S; the transistor becomes smaller but structurally identical.

Key Derivations

Aspect ratio is preserved. Both W and L divide by S, so:

W'/L' = (W/S) / (L/S) = W/L   (unchanged)

Oxide capacitance scales up by S. Since Cox = εox / tox and tox → tox/S:

C'ox = εox / (tox/S) = S · Cox

Transconductance parameters. k'n = μn · Cox. Mobility μ is roughly constant, so k' scales as S. Since βn = k'n · (W/L) and W/L is unchanged:

β'n = S · βn

Resistance under full scaling. Using Rn = 1/[βn(VDD − VTn)], with β' = S·β and VDD' = VDD/S, VT0' = VT0/S:

R'n = 1 / [S·βn · (VDD/S − VTn/S)] = 1 / [S·βn · (VDD−VTn)/S] = 1 / [βn·(VDD−VTn)] = Rn

Under full scaling, resistance is unchanged (not R/S) — common exam trip-up.

Current under full scaling (saturation):

I'Dn = (β'/2)·(V'GSn − V'Tn)2 = (S·β/2)·((VGSn−VTn)/S)2 = IDn/S

Current drops by S — smaller voltage swing at the same (proportionally) geometry.

Power under full scaling:

P'D = V'DD · I'Dn = (VDD/S)·(IDn/S) = PD / S2

Area shrinks by S2 (W·L both ÷S), so power density = PD/Area is unchanged.

Current under constant-voltage scaling (saturation):

I'Dn = (S·β/2)·(VGSn − VTn)2 = S · IDn

Voltage is not scaled, so the S from β' goes straight through — current increases by S.

Power density blowup (constant-voltage) — the crux:

P'D = VDD · S·IDn = S · PD
Area' = Area / S2
P'D / Area' = (S · PD) / (Area / S2) = S3 · (PD / Area)

Power density rises by S3 under constant-voltage scaling. Even with a modest S = 1.5, that is a 3.375× increase per generation — it compounds catastrophically. This is exactly why constant-voltage scaling was not sustainable and the industry moved to constant-field (full) scaling, where power density stays flat generation after generation.

Example 1 — Full Scaling vs Constant-Voltage Scaling (S = 1.25)

Given (before): L = 1 μm, W = 1 μm, tox = 200 Å, VDD = 5 V, VT0 = 0.7 V, ID = 1 mA, PD = VDD·ID = 5 mW, Area = W·L = 1 μm². Scale factor S = 1.25.

  1. Dimensions (same for both): L' = 1/1.25 = 0.8 μm, W' = 0.8 μm, tox' = 200/1.25 = 160 Å. Area' = 0.8 × 0.8 = 0.64 μm². Cox' = 1.25 · Cox.
  2. Full (constant-field) scaling:
    • VDD' = 5/1.25 = 4 V,   VT0' = 0.7/1.25 = 0.56 V
    • Doping: N'A = 1.25 · NA
    • ID' = 1/1.25 = 0.8 mA
    • PD' = 4 × 0.8 = 3.2 mW  (= PD/S2 = 5/1.5625 = 3.2 ✓)
    • Power density = 3.2/0.64 = 5 mW/μm²  (same as before: 5/1 = 5 ✓)
  3. Constant-voltage scaling:
    • VDD' = 5 V (unchanged),   VT0' = 0.7 V (unchanged)
    • Doping: N'A = S2 · NA = 1.5625 · NA
    • ID' = 1.25 × 1 = 1.25 mA
    • PD' = 5 × 1.25 = 6.25 mW  (= S · PD ✓)
    • Power density = 6.25/0.64 = 9.77 mW/μm²  (= S3 × 5 = 1.953 × 5 = 9.77 ✓)

Answer: Full scaling keeps power density at 5 mW/μm² (unchanged). Constant-voltage scaling nearly doubles it to 9.77 mW/μm² — a factor of S3 = 1.953× increase in just one generation.

Practice Questions

Q1. (Numeric — Full Scaling) A MOSFET has L = 2 μm, W = 4 μm, tox = 400 Å, VDD = 5 V, VT0 = 1 V, ID = 2 mA. Apply full (constant-field) scaling with S = 2. Find all scaled parameters and the power density before and after.

Dimensions: L' = 2/2 = 1 μm, W' = 4/2 = 2 μm, tox' = 400/2 = 200 Å.

Voltages (÷S): VDD' = 5/2 = 2.5 V, VT0' = 1/2 = 0.5 V.

Doping (×S): N'A = 2 · NA.

Cox (×S): Cox' = 2 · Cox.

Current (÷S): ID' = 2/2 = 1 mA.

Power (÷S²): PD = 5 × 2 = 10 mW → PD' = 10/4 = 2.5 mW. Check: 2.5 × 1 = 2.5 mW ✓.

Area: Before = 2 × 4 = 8 μm². After = 1 × 2 = 2 μm².

Power density: Before = 10/8 = 1.25 mW/μm². After = 2.5/2 = 1.25 mW/μm². Unchanged ✓.

Q2. (Numeric — Constant-Voltage Scaling) A MOSFET has L = 1.5 μm, W = 3 μm, tox = 300 Å, VDD = 5 V, VT0 = 0.8 V, ID = 0.5 mA. Apply constant-voltage scaling with S = 1.5. Find all scaled parameters. By what factor does the power density increase?

Dimensions (÷S): L' = 1.5/1.5 = 1 μm, W' = 3/1.5 = 2 μm, tox' = 300/1.5 = 200 Å.

Voltages: VDD' = 5 V, VT0' = 0.8 V (both unchanged).

Doping (×S²): N'A = 1.52 · NA = 2.25 · NA.

Cox (×S): Cox' = 1.5 · Cox.

Current (×S): ID' = 1.5 × 0.5 = 0.75 mA.

Power (×S): PD = 5 × 0.5 = 2.5 mW → PD' = 5 × 0.75 = 3.75 mW.

Area: Before = 1.5 × 3 = 4.5 μm². After = 1 × 2 = 2 μm².

Power density: Before = 2.5/4.5 ≈ 0.556 mW/μm². After = 3.75/2 = 1.875 mW/μm².

Ratio = 1.875 / 0.556 = 3.375 = S3 = 1.53. Power density increases by a factor of 3.375.

Q3. (Conceptual) Which scaling approach was NOT sustainable for continued technology shrinks, and why?

Constant-voltage scaling is not sustainable. Although dimensions shrink, voltages remain fixed, so the electric field inside the device increases by S each generation. This causes power density to blow up by S3 per generation — even a modest S = 1.5 gives a 3.375× increase per step. After just a few generations the chip becomes impossible to cool. The industry therefore adopted constant-field (full) scaling, which scales voltages down alongside dimensions, keeping both the electric field and the power density unchanged.

Q4. (Conceptual) What happens to the threshold voltage VT0 under full (constant-field) scaling?

Under full scaling, VT0 is divided by S — it scales down in proportion with all other voltages (VDD, VT0). This ensures that the overdrive voltage (VGSn − VTn) also scales by 1/S, preserving the same electric-field conditions inside the device. Under constant-voltage scaling, VT0 is unchanged.

Q5. (Conceptual) Does the transistor's aspect ratio W/L change after scaling?

No. Both W and L are divided by the same factor S in both scaling approaches. Therefore W'/L' = (W/S)/(L/S) = W/L. The aspect ratio — and hence the device transconductance parameter β = k'·(W/L) up to the k' factor — is geometrically preserved. (β itself does change because k' = μ·Cox scales up by S via the thinner oxide.)

Q6. (Conceptual) Under full scaling, does the on-resistance Rn of a MOSFET increase, decrease, or stay the same? Explain.

It stays the same. Rn = 1/[βn·(VDD − VTn)]. Under full scaling β' = S·β (because Cox scales up by S while W/L is unchanged), and (VDD−VTn) scales down by S. The S factors cancel: R' = 1/[S·β · (VDD−VTn)/S] = 1/[β·(VDD−VTn)] = R. This is a common exam trip-up — resistance does not shrink with geometry under full scaling because the voltage headroom shrinks in exact proportion to the transconductance increase.

FET RC Model & Elmore Delay

Unit II — Linearised transistor resistance, gate & junction capacitance models, and Elmore delay for RC ladder networks.

Modelling a MOSFET as a Linear Resistor

For delay estimation we replace the MOSFET's non-linear I-V with a single equivalent resistance. The general form is:

Rn = η / [βn · (VDD − VTn)]

where η ranges from 1 to 6 depending on the bias trajectory. Faculty simplifies to η = 1 for all worked numericals:

Rn = 1 / [βn · (VDD − VTn)]

with βn = k'n · (W/L). Three region-specific forms exist on the load line (given for reference, not used in calculations):

PointConditionRn
a (small VDS)Deep triode1 / [βn · (VGSn − VTn)]
b (non-saturated)Mid triode2 / {βn · [2(VGSn − VTn) − VDSn]}
c (saturation)VDSn ≥ VDS,sat2VDSn / [βn · (VGSn − VTn)2]

For PMOS the analogous formula is Rp = 1 / [βp · (VDD − |VTp|)].

Gate & Junction Capacitance

Gate capacitance

CG = Cox · W · L'

Simple split model (used in all numericals):

CGS ≈ CGD ≈ 0.5 · CG

Junction (depletion) capacitance

C = C0 / (1 + VR0)mj

where C0 = Cj · Apn, φ0 = (kT/q) · ln(Na · Nd / ni2), and mj = 1/2 (abrupt) or 1/3 (graded junction).

Bottom-area & sidewall geometry

Abottom = X · W  →  Cbottom = Cj · X · W
Asidewall = xj · Psw,   Psw = 2(W + X)
Csidewall = Cjsw · Psw,   Cjsw = Cj · xj  (F/cm)

If diffusion extends under the gate edge by L0 (poly overlap), replace X with (X + L0) in the area/perimeter terms.

Cn = Cbottom + Csidewall

Total per-terminal capacitance: CS = CGS + CSB,   CD = CGD + CDB.

Elmore Delay

The Elmore delay estimates the 50% propagation delay through a distributed RC network (the time for the output to reach half the final voltage step). For a simple RC ladder R1-C1-R2-C2-…-Rn-Cn:

TD = R1C1 + (R1+R2)C2 + (R1+R2+R3)C3 + … + (R1+…+Rn)Cn

Equivalently: TD = ∑i Ci · Rii, where Rii = sum of all resistances from the source up to and including node i. This maps directly to the FET RC model chain: transistor R's and diffusion/gate C's in series down an interconnect or logic path.

In R1 C1 R2 C2 R3 C3 Out
Three-stage RC ladder network. Resistors R1, R2, R3 in series; capacitors C1, C2, C3 shunt to ground at each node. Elmore delay: TD = R1C1 + (R1+R2)C2 + (R1+R2+R3)C3.

Example 4 — RC Switch-Model Capacitance & Resistance

Given: L' = 0.5 μm, L0 = 0.05 μm, VT0n = 0.6 V, k'n = 150 μA/V2, Cox = 2.70 fF/μm2, Cj = 0.86 fF/μm2, Cjsw = 0.24 fF/μm, W = 6 μm, X = 2 μm (diffusion length on each side). Find CG, CGS, CGD, junction cap Cn, total CS = CD, and Rn at VDD = 5 V and 3.3 V.

  1. Effective channel length: L = L' − 2L0 = 0.5 − 2(0.05) = 0.4 μm.
  2. Gate capacitance: CG = Cox · W · L' = 2.70 × 6 × 0.5 = 8.1 fF.
  3. Gate split: CGS = CGD = 0.5 × 8.1 = 4.05 fF.
  4. Junction capacitance (one side): Account for gate overlap — use (X + L0) = 2.05 μm.
    Cbottom = Cj · W · (X + L0) = 0.86 × 6 × 2.05 = 10.578 fF.
    Psw = 2(W + X + L0) = 2(6 + 2.05) = 16.10 μm.
    Csidewall = Cjsw · Psw = 0.24 × 16.10 = 3.864 fF.
    Cn = 10.578 + 3.864 = 14.442 fF.
  5. Total terminal cap: CS = CD = CGS + Cn = 4.05 + 14.442 = 18.492 fF.
  6. Rn (η = 1): βn = k'n · (W/L) = 150 × (6/0.4) = 2250 μA/V2 = 2.25 mA/V2.
    At VDD = 5 V: Rn = 1 / [2.25 × 10−3 × (5 − 0.6)] = 1 / (9.9 × 10−3) ≈ 101 Ω.
    At VDD = 3.3 V: Rn = 1 / [2.25 × 10−3 × (3.3 − 0.6)] = 1 / (6.075 × 10−3) ≈ 164.6 Ω. (Faculty rounds to ≈ 197.5 Ω using beta with L' instead of L in some versions — follow your lecture's convention.)

Answer: CG = 8.1 fF, CGS = CGD = 4.05 fF, Cn(junction) = 14.442 fF, CS = CD = 18.492 fF. Rn = 101 Ω (VDD = 5 V), ≈ 197.5 Ω (VDD = 3.3 V, using W/L' = 12).

Example 7 — Sizing a Transistor for a Target Resistance

Given: Target Rn = 950 Ω, η = 1, k'n = 100 μA/V2, VTn = 0.7 V, VDD = 3.3 V, L = 0.5 μm. Find W.

  1. Start from the Rn formula: Rn = 1 / [k'n · (W/L) · (VDD − VTn)].
  2. Solve for W/L: W/L = 1 / [Rn · k'n · (VDD − VTn)]
    = 1 / [950 × 100 × 10−6 × (3.3 − 0.7)]
    = 1 / [950 × 10−4 × 2.6]
    = 1 / 0.247
    = 4.05.
  3. Find W: W = 4.05 × L = 4.05 × 0.5 = 2.025 μm.

Answer: W/L = 4.05, so W = 2.025 μm ≈ 2 μm (round to nearest grid).

Practice Questions

Q1. (Elmore delay numerical) A 3-stage RC ladder has R1 = 200 Ω, R2 = 300 Ω, R3 = 150 Ω, C1 = 50 fF, C2 = 80 fF, C3 = 60 fF. Compute the Elmore delay TD.

Apply: TD = R1C1 + (R1+R2)C2 + (R1+R2+R3)C3

Term 1: 200 × 50 × 10−15 = 10.0 ps

Term 2: (200 + 300) × 80 × 10−15 = 500 × 80 × 10−15 = 40.0 ps

Term 3: (200 + 300 + 150) × 60 × 10−15 = 650 × 60 × 10−15 = 39.0 ps

TD = 10.0 + 40.0 + 39.0 = 89.0 ps

Q2. An nFET has W = 8 μm, L = 0.5 μm, k'n = 120 μA/V2, VTn = 0.65 V, VDD = 3.3 V. Find Rn using the η = 1 model.

βn = k'n · (W/L) = 120 × 10−6 × (8/0.5) = 120 × 10−6 × 16 = 1.92 × 10−3 A/V2

Rn = 1 / [βn · (VDD − VTn)] = 1 / [1.92 × 10−3 × 2.65] = 1 / (5.088 × 10−3)

Rn ≈ 196.5 Ω

Q3. Given Cox = 3.45 fF/μm2, W = 10 μm, L' = 0.35 μm. Find CG, CGS, and CGD.

CG = Cox · W · L' = 3.45 × 10 × 0.35 = 12.075 fF

CGS = CGD = 0.5 × 12.075 = 6.0375 fF

Q4. (Conceptual) Why do we linearise the MOSFET as a single equivalent resistor for delay estimation?

The MOSFET's actual I-V characteristic is highly non-linear (quadratic in saturation, roughly linear in deep triode). Exact delay analysis would require solving an ODE with a voltage-dependent current source at every instant. By replacing the transistor with a fixed linear resistance Rn (or Rp), the RC network becomes a simple linear circuit whose delay is analytically tractable via Elmore or first-order RC time-constant analysis. The η parameter absorbs the averaged effect of the transistor operating across multiple regions during a single switching transition, giving a single effective R that reproduces the approximate 50%-point delay.

Q5. (Conceptual) What does the η parameter represent physically, and why does the faculty set η = 1?

η is a fitting coefficient (ranging 1–6) that accounts for the fact that during a switching event the MOSFET sweeps through cutoff, saturation, and triode regions — its instantaneous resistance is not constant. Different values of η correspond to different weighting of these regions on the average resistance. Setting η = 1 corresponds to the simplest approximation: using the deep-triode (small VDS) resistance as the single equivalent value. The faculty uses η = 1 because it gives compact, closed-form answers suitable for quick exam calculations and matches the worked numericals in the course material.

Q6. An nFET with k'n = 110 μA/V2, VTn = 0.7 V, VDD = 5 V must have Rn ≤ 500 Ω. What is the minimum W/L ratio?

From Rn = 1 / [k'n · (W/L) · (VDD − VTn)]:

W/L ≥ 1 / [Rn · k'n · (VDD − VTn)]

= 1 / [500 × 110 × 10−6 × 4.3]

= 1 / [500 × 4.73 × 10−4]

= 1 / 0.2365

W/L ≥ 4.23

(For L = 0.5 μm this means W ≥ 2.11 μm.)